M-Compact UV Lithography System

Easy-to-Use and Affordable UV Lithography System

  • 11.6 Inch Touch Screen.
  • User-friendly Interface.
  • Single Wafer Vacuum Chuck for 2 Inch and 4 Inch Wafers.
  • Easy-to-Use Vacuum Holder for 5″ Photomasks.
  • LED Based UV Light Source.
  • 365 nm Wavelength.
  • Time Setting (1 s Steps).
  • Vacuum Pump.
  • Vacuum Contact Lithography.
  • Upgradeable to M-Pro Mask Aligner
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