UV-EX Compact Lithography System

Compact UV Lithography System

• Digital Touch Screen.
• Wafer Vacuum Chuck.
• 5″ Mask Vacuum Holder.
• LED Based UV Source.
• 365 nm Wavelength.
• Time Setting (1 s Steps).
• Exposure Setting (10% – 100 %).
• Vacuum Pump.
• Solenoid Vacuum Valves.
• Vacuum Contact Lithography.