M-Compact Lithography System
Compact UV Lithography System
- 11.6 Inch Touch Screen.
- User-friendly Interface.
- Wafer Vacuum Chuck for 2 Inch and 4 Inch Wafers.
- 5″ Mask Vacuum Holder.
- LED Based UV Source.
- 365 nm Wavelength.
- Time Setting (1 s Steps).
- Exposure Setting (10% – 100 %).
- Vacuum Pump.
- Solenoid Vacuum Valves.
- Vacuum Contact Lithography.
- Upgradeable to M-Pro Mask Aligner