UV-EX Compact Lithography System

Compact UV Lithography System

  • Digital Touch Screen.
  • Wafer Vacuum Chuck.
  • 5″ Mask Vacuum Holder.
  • LED Based UV Source.
  • 365 nm Wavelength.
  • Time Setting (1 s Steps).
  • Exposure Setting (10% – 100 %).
  • Vacuum Pump.
  • Solenoid Vacuum Valves.
  • Vacuum Contact Lithography.