M-Compact UV Lithography System

Easy-to-Use and Affordable UV Lithography System

• 11.6 Inch Touch Screen.
• User-friendly Interface.
• Single Wafer Vacuum Chuck for 2 Inch and 4 Inch Wafers.
• Easy-to-Use Vacuum Holder for 5″ Photomasks.
• LED Based UV Light Source.
• 365 nm Wavelength.
• Time Setting (1 s Steps).
• Vacuum Pump.
• Vacuum Contact Lithography.
• Upgradeable to M-Pro Mask Aligner