M-Compact Lithography System

Compact UV Lithography System

  • 11.6 Inch Touch Screen.
  • User-friendly Interface.
  • Wafer Vacuum Chuck for 2 Inch and 4 Inch Wafers.
  • 5″ Mask Vacuum Holder.
  • LED Based UV Source.
  • 365 nm Wavelength.
  • Time Setting (1 s Steps).
  • Exposure Setting (10% – 100 %).
  • Vacuum Pump.
  • Solenoid Vacuum Valves.
  • Vacuum Contact Lithography.
  • Upgradeable to M-Pro Mask Aligner