M-Compact Lithography System

Compact UV Lithography System

• 11.6 Inch Touch Screen.
• User-friendly Interface.
• Wafer Vacuum Chuck for 2 Inch and 4 Inch Wafers.
• 5″ Mask Vacuum Holder.
• LED Based UV Source.
• 365 nm Wavelength.
• Time Setting (1 s Steps).
• Exposure Setting (10% – 100 %).
• Vacuum Pump.
• Solenoid Vacuum Valves.
• Vacuum Contact Lithography.
• Upgradeable to M-Pro Mask Aligner