M-Compact UV Lithography System
Easy-to-Use and Affordable UV Lithography System
- 11.6 Inch Touch Screen.
- User-friendly Interface.
- Single Wafer Vacuum Chuck for 2 Inch and 4 Inch Wafers.
- Easy-to-Use Vacuum Holder for 5″ Photomasks.
- LED Based UV Light Source.
- 365 nm Wavelength.
- Time Setting (1 s Steps).
- Vacuum Pump.
- Vacuum Contact Lithography.
- Upgradeable to M-Pro Mask Aligner