UV-EX Compact Lithography System
Compact UV Lithography System
- Digital Touch Screen.
- Wafer Vacuum Chuck.
- 5″ Mask Vacuum Holder.
- LED Based UV Source.
- 365 nm Wavelength.
- Time Setting (1 s Steps).
- Exposure Setting (10% – 100 %).
- Vacuum Pump.
- Solenoid Vacuum Valves.
- Vacuum Contact Lithography.