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MULTI-STEP LITHOGRAPHY TIPS 🎁

You want to shape a transparent material with lithography, then cover it with another layer of the same material and shape it. However, you have to align the pattern on the 2nd floor with the pattern below. As both layers are transparent, the alignment markers on the bottom are hardly visible under the microscope. How would you align both patterns relative to each other?

Tip 🎁: Pay attention to the red lines around the inner crosses.

NOTE: Multilayer lithography method is one of the basic production stages of many electronic devices, integrated circuits, chips and microfluidic systems.

The above pattern was made with the UV-EX Pioneer mask aligner system.