UV-EX Pro Lithography System

Professional UV Lithography System

  • Digital Touch Screen.
  • Wafer Vacuum Chuck.
  • 5² Mask Vacuum Holder.
  • 4-axis Mask Aligning System.
  • LED Based UV Source.
  • 365 nm Wavelength.
  • Time Setting (1 s Steps).
  • Exposure Setting (10% – 100 %).
  • Vacuum Pump.
  • Solenoid Vacuum Valves.
  • Vacuum Contact Lithography.
  • Stereo Zoom Microscope (4.5x).
  • Microscope Camera with 10² Screen.
  • 3-axis Microscope Stage.