M-Pro Mask Aligner

Professional UV Lithography & Mask Alignment System

• 11.6 Inch Touch Screen.
• User-friendly Interface.
• Wafer Vacuum Chuck for 2 Inch and 4 Inch Wafers.
• 5″ Mask Vacuum Holder.
• 4-axis Wafer/Mask Aligning System.
• LED Based UV Source.
• 365 nm Wavelength.
• Time Setting (1 s Steps).
• Exposure Setting (10% – 100 %).
• Vacuum Pump.
• Solenoid Vacuum Valves.
• Vacuum Contact Lithography.
• Alignment Microscope and Camera with 4 Objectives (5x, 10x, 20x, 50x).
• 3-axis Microscope Stage.