UV-EX Pro Lithography System

Professional UV Lithography System

• Digital Touch Screen.
• Wafer Vacuum Chuck.
• 5² Mask Vacuum Holder.
• 4-axis Mask Aligning System.
• LED Based UV Source.
• 365 nm Wavelength.
• Time Setting (1 s Steps).
• Exposure Setting (10% – 100 %).
• Vacuum Pump.
• Solenoid Vacuum Valves.
• Vacuum Contact Lithography.
• Stereo Zoom Microscope (4.5x).
• Microscope Camera with 10² Screen.
• 3-axis Microscope Stage.