M-Pro Mask Aligner

Professional UV Lithography & Mask Alignment System

  • 11.6 Inch Touch Screen.
  • User-friendly Interface.
  • Wafer Vacuum Chuck for 2 Inch and 4 Inch Wafers.
  • 5″ Mask Vacuum Holder.
  • 4-axis Wafer/Mask Aligning System.
  • LED Based UV Source.
  • 365 nm Wavelength.
  • Time Setting (1 s Steps).
  • Exposure Setting (10% – 100 %).
  • Vacuum Pump.
  • Solenoid Vacuum Valves.
  • Vacuum Contact Lithography.
  • Alignment Microscope and Camera with 4 Objectives (5x, 10x, 20x, 50x).
  • 3-axis Microscope Stage.