UV-EX Pioneer Lithography System

    UV Lithography and Mask Aligner System

    • Digital Touch Screen.
    • Wafer Vacuum Chuck.
    • 5″ Mask Vacuum Holder.
    • 3-axis Mask Aligning System.
    • LED Based UV Source.
    • 365 nm Wavelength.
    • Time Setting (1 s Steps).
    • Exposure Setting (10% – 100 %).
    • Vacuum Pump.
    • Vacuum Contact Lithography.
    • Stereo Zoom Microscope (4.5x).
    • Microscope Camera with 10″ Screen.
    • 3-axis Microscope Stage.