UV-EX Pioneer Lithography System

UV Lithography and Mask Aligner System

• Digital Touch Screen.
• Wafer Vacuum Chuck.
• 5″ Mask Vacuum Holder.
• 3-axis Mask Aligning System.
• LED Based UV Source.
• 365 nm Wavelength.
• Time Setting (1 s Steps).
• Exposure Setting (10% – 100 %).
• Vacuum Pump.
• Vacuum Contact Lithography.
• Stereo Zoom Microscope (4.5x).
• Microscope Camera with 10″ Screen.
• 3-axis Microscope Stage.